Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities
                    
                        
                            نویسندگان
                            
                            
                        
                        
                    
                    
                    چکیده
منابع مشابه
Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities.
We present the fabrication and characterization of high-quality-factor (Q) Si3N4 photonic crystal nanobeam cavities at visible wavelengths for coupling to nitrogen-vacancy centers in a cavity QED system. Confocal microphotoluminescence analysis of the nanobeam cavities demonstrates quality factors up to Q ~ 55,000, which are limited by the resolution of our grating spectrometer. This is a 1-ord...
متن کاملHigh Quality factor photonic crystal nanobeam cavities
We investigate the design, fabrication and experimental characterization of high Quality factor photonic crystal nanobeam cavities in silicon. Using a five-hole tapered 1D photonic crystal mirror and precise control of the cavity length, we designed cavities with theoretical Quality factors as high as 1.4 × 10. By detecting the cross-polarized resonantly scattered light from a normally incident...
متن کاملEffect of atomic layer deposition on the quality factor of silicon nanobeam cavities
Michael Gehl,* Ricky Gibson, Joshua Hendrickson, Andrew Homyk, Antti Säynätjoki, Tapani Alasaarela, Lasse Karvonen, Ari Tervonen, Seppo Honkanen, Sander Zandbergen, Benjamin C. Richards, J. D. Olitzky, Axel Scherer, Galina Khitrova, Hyatt M. Gibbs, Ju-Young Kim, and Yong-Hee Lee College of Optical Sciences, University of Arizona, 1630 East University Boulevard, Tucson, Arizona 85721, USA Air Fo...
متن کاملObservation of transparency of Erbium-doped silicon nitride in photonic crystal nanobeam cavities.
One dimensional nanobeam photonic crystal cavities are fabricated in an Er-doped amorphous silicon nitride layer. Photoluminescence from the cavities around 1.54 microm is studied at cryogenic and room temperatures at different optical pump powers. The resonators demonstrate Purcell enhanced absorption and emission rates, also confirmed by time resolved measurements. Resonances exhibit linewidt...
متن کاملA quantum optical study of thresholdless lasing features in high-β nitride nanobeam cavities
Exploring the limits of spontaneous emission coupling is not only one of the central goals in the development of nanolasers, it is also highly relevant regarding future large-scale photonic integration requiring energy-efficient coherent light sources with a small footprint. Recent studies in this field have triggered a vivid debate on how to prove and interpret lasing in the high-β regime. We ...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Optics Letters
سال: 2011
ISSN: 0146-9592,1539-4794
DOI: 10.1364/ol.36.000421